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CERAMIC PRESSURE SENSORS

MAIN TECHNICAL DATA OF PRESSURE SENSORS FROM METALLUX SA

Family

Coding

Pressure range (f.s.)

Kind of measured pressure

Technology (transduction principle)

Sensor diameter

Structure

Thermal compensation

Signal conditioning

Signal output

Image

ME50x

ME501

0,5 - 1 - 2 - 5 - 10 - 20 - 50 Bar

Absolute, Gauge, Sealed Gauge Pressure

Piezoresistive ceramic pressure sensor

18.00 mm

Flush membrane

Thermal PTC- compensated cell

Wheatstone bridge

Differential signal mV/V

ME505

100 - 200 - 400 - 600 Bar

Sealed gauge

Piezoresistive ceramic pressure sensor

18.00 mm

Flush membrane

Thermal PTC- compensated cell

Wheatstone bridge

Differential signal mV/V

ME506

1 - 2 - 5 - 10 - 20 Bar

Absolute, Gauge, Sealed Gauge Pressure

Piezoresistive ceramic pressure sensor

15.00 mm

Flush membrane

Thermal PTC- compensated cell

Wheatstone bridge

Differential signal mV/V

ME509

200 - 500 mBar

Absolute, Gauge Pressure

Piezoresistive ceramic pressure sensor

32.40 mm

Flush membrane

Thermal PTC- compensated cell

Wheatstone bridge

Differential signal mV/V

ME6xx

ME651

2 - 5 - 10 - 20 - 50 - 100 - 200 - 400 Bar

Gauge

Piezoresistive ceramic pressure sensor

18.00 mm

Monolithic cavity membrane

Thermal PTC- compensated cell

Wheatstone bridge

Differential signal mV/V

ME657

350 Bar

Gauge

Piezoresistive ceramic pressure sensor

12.85 mm

Monolithic cavity membrane

Cell without thermal compensation

Wheatstone bridge

Differential signal mV/V - example of housing

ME662

2 - 5 - 10 - 20 - 50 - 100 - 200- 400- Bar

Gauge

Piezoresistive ceramic pressure sensor

18.00 mm

Monolithic cavity membrane

Cell without temperature compensation

Wheatstone bridge

Differential signal mV/V

ME667

2- 10- Bar or on req.

Gauge pressure and temperature

Piezoresistive ceramic pressure sensor with NTC

18.00 mm

Monolithic cavity membrane

Cell without thermal compensation

Wheatstone bridge

Differential- signal mV/V - NTC 10K Beta3435

ME7xx

ME705

2 - 5 - 10 - 20 - 50 - 100 - 200- 400- Bar

Gauge

Piezoresistive ceramic pressure transducer cell

18.00 mm

Monolithic cavity membrane

Thermal compensated cell and pressure calibration

Analog signal conditioning

0,5....4,5 V ratiometric

ME707

0,5- 1- 2- 5- 10- 20- 50- 100- 200- 400- 600- Bar

Absolute- Gauge- Sealed Gauge Pressure

Piezoresistive ceramic pressure transducer cell

18.00 mm

Flush membrane

Thermal compensated and pressure calibration

Analog signal conditioning

0,5...4,5V ratiometric

ME75X

2 - 5 - 10 - 20 - 50 - 100 - 200- 400- Bar

Gauge

Piezoresistive ceramic pressure transducer cell

18.00 mm

Monolithic cavity membrane

Temperature and pressure calibration

ASIC - digital signal conditioning

0,5....4,5V (ratiom.) or 4-20mA or 0-10V

ME77X

0,5- 1- 2- 5- 10- 20- 50- 100- 200- 400- 600- Bar

Absolute- Gauge- Sealed Gauge Pressure

Piezoresistive ceramic pressure transducer cell

18.00 mm

Flush membrane

Temperature and pressure calibration

ASIC - digital signal conditioning

0,5....4,5V (ratiom.) or 4-20mA or 0-10V

ME780

0,5- 1- 2- 5- 10- 20- 50- 100- 200- 400- 600- Bar

Absolute- Gauge- Sealed Gauge Pressure

Piezoresistive ceramic pressure transducer cell

18.00 mm

Flush membrane

Temperature and pressure calibration

Embedded integrated electronic

0,5...4,5V ratiometric

ME55x

ME550

0.06- 0.16- 0.40- 1- 2- 5-10- 20- Bar

Absolute- Gauge Pressure

Capacitive ceramic pressure sensor

32.40 mm

Flush membrane -96% or 99% Al2O3

Cell without thermal compensation

Capacitance transduction principle

Capacity (pF) proportional to pressure

ME703

0.06- 0.16- 0.40- 1- 2- 5-10- 20- Bar

Absolute- Gauge Pressure

Capacitive ceramic pressure sensor

32.4 mm

Flush membrane Al2O3 96% or 99%

Si-Diode on the electronics

Conversion of capacity in frequency

Frequency signal Fx/Fr (Hz)

Customized sensors

MEMxxx

0.06....600 Bar f.s.

Absolute- GaugePressure

Piezoresistive, capacitive, silicon sensors (MEMS)

Custom design

Ceramic, steel, or silicon cells on ceramic or p.c.b. (COB)

Custom specific calibrations

Wheatshone bridge, embedded electronics, etc.

mV/V, V-ratiometric, current loop, Bus etc

CERAMIC PRESSURE SENSORS

BENEFITS AND APPLICATIONS

RESEARCH AND DEVELOPMENT

CASE HISTORY

CERAMIC PRESSURE SENSORS

CHARACTERISTICS AND APPLICATIONS:

The Metallux SA ceramic sensors are piezoresistive pressure sensors or capacitive pressure sensors based on Al2O3 (Alumina Oxyde) membrane. In case of the piezoresistive models, the measuring bridge is printed directly on one side of the diaphragm by means of the thick film technology. In case of the capacitive models, two capacitors are created in the inner side of the ceramic membrane and the ceramic body. When under pressure, the membrane is changing its distance against the opposite metal schield, changing proportionally to the pressure, the resulting capacity.

Because of the excellent chemical resistance no additional protection is normally required and the rear part of the membrane can be exposed directly to aggressive environment. The fields they are designed for are several: industrial applications, medical instrumentation systems, environmental control systems, domestic appliances, automotive applications, pneumatic and hydraulic systems.

CERAMIC PRESSURE SENSORS

BENEFITS AND APPLICATIONS

RESEARCH AND DEVELOPMENT

CASE HISTORY

CERAMIC PRESSURE SENSORS

BENEFITS

• Easy mounting

• Chemical resistance

• Low cost

• Wide temperature range

• Excellent mechanical robustness

• Bio-compatibility

• Wide pressure range

• Good long term stability

• Applicable in the food industry

• Internal thermal offset compensation

APPLICATIONS

• Automotive

• Medical

• Industrial and process automation

• Level monitoring

• Domotics

• Food and beverage

• Agriculture

• Consumer goods

• Sport and Leisure

• Transports

• Force measurement

CERAMIC PRESSURE SENSORS

BENEFITS AND APPLICATIONS

RESEARCH AND DEVELOPMENT

CASE HISTORY

CERAMIC PRESSURE SENSORS

RESEARCH AND DEVELOPMENT

“Development of weldable stainless steel pressure sensor

“Development of capacitive pressure sensors

“Development of piezoresistive pressure sensors in silicon

“Development of amplified pressure sensors

“Development of differential pressure sensors

“Development of pressure sensors for automotive applications

CERAMIC PRESSURE SENSORS

BENEFITS AND APPLICATIONS

RESEARCH AND DEVELOPMENT

CASE HISTORY

CERAMIC PRESSURE SENSORS

BENEFITS AND APPLICATIONS

RESEARCH AND DEVELOPMENT

CASE HISTORY

Legal Information

Metallux SA (www.metallux.ch) - your innovation partner for: pressure sensor cells - pressure transducers - ceramic pressure sensors - thick film piezoresistive ceramic pressure sensors - flush membrane ceramic pressure sensor - cavity membrane ceramic pressure sensor -capacitance or capacitive ceramic pressure sensors - pressure and temperature ceramic measuring cells - pressure sensor for urea in SCR systems (selective Catalytic Reduction) - pressure range from 0,06Bar to 750 Bar- pressure sensors cell with signal conditioning output 4-20mA or 0,5-4,5V or 0/10V-pressure sensor for harsh applications - pressure transducers - pressure transmitters - absolute pressure measurement - gauge pressure measurement - sealed gauge pressure measurement - differential pressure measurement - high resistance to overpressure ceramic sensor cell - chemical resistant sensor cell to aggressive media pressure cells - packaging technology for silicon pressure sensors - thick film hybrid electronic modues manufacturing - COB - chip & wire assemblies services.

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