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CERAMIC PRESSURE SENSORS
MAIN TECHNICAL DATA OF PRESSURE SENSORS FROM METALLUX SA
Family
Coding
Pressure range (f.s.)
Kind of measured pressure
Technology (transduction principle)
Sensor diameter
Structure
Thermal compensation
Signal conditioning
Signal output
Image
ME50x
ME501
0,5 - 1 - 2 - 5 - 10 - 20 - 50 Bar
Absolute, Gauge, Sealed Gauge Pressure
Piezoresistive ceramic pressure sensor
18.00 mm
Flush membrane
Thermal PTC- compensated cell
Wheatstone bridge
Differential signal mV/V
ME505
100 - 200 - 400 - 600 Bar
Sealed gauge
Piezoresistive ceramic pressure sensor
18.00 mm
Flush membrane
Thermal PTC- compensated cell
Wheatstone bridge
Differential signal mV/V
ME506
1 - 2 - 5 - 10 - 20 Bar
Absolute, Gauge, Sealed Gauge Pressure
Piezoresistive ceramic pressure sensor
15.00 mm
Flush membrane
Thermal PTC- compensated cell
Wheatstone bridge
Differential signal mV/V
ME509
200 - 500 mBar
Absolute, Gauge Pressure
Piezoresistive ceramic pressure sensor
32.40 mm
Flush membrane
Thermal PTC- compensated cell
Wheatstone bridge
Differential signal mV/V
ME6xx
ME651
2 - 5 - 10 - 20 - 50 - 100 - 200 - 400 Bar
Gauge
Piezoresistive ceramic pressure sensor
18.00 mm
Monolithic cavity membrane
Thermal PTC- compensated cell
Wheatstone bridge
Differential signal mV/V
ME657
350 Bar
Gauge
Piezoresistive ceramic pressure sensor
12.85 mm
Monolithic cavity membrane
Cell without thermal compensation
Wheatstone bridge
Differential signal mV/V - example of housing
ME662
2 - 5 - 10 - 20 - 50 - 100 - 200- 400- Bar
Gauge
Piezoresistive ceramic pressure sensor
18.00 mm
Monolithic cavity membrane
Cell without temperature compensation
Wheatstone bridge
Differential signal mV/V
ME667
2- 10- Bar or on req.
Gauge pressure and temperature
Piezoresistive ceramic pressure sensor with NTC
18.00 mm
Monolithic cavity membrane
Cell without thermal compensation
Wheatstone bridge
Differential- signal mV/V - NTC 10K Beta3435
ME7xx
ME705
2 - 5 - 10 - 20 - 50 - 100 - 200- 400- Bar
Gauge
Piezoresistive ceramic pressure transducer cell
18.00 mm
Monolithic cavity membrane
Thermal compensated cell and pressure calibration
Analog signal conditioning
0,5....4,5 V ratiometric
ME707
0,5- 1- 2- 5- 10- 20- 50- 100- 200- 400- 600- Bar
Absolute- Gauge- Sealed Gauge Pressure
Piezoresistive ceramic pressure transducer cell
18.00 mm
Flush membrane
Thermal compensated and pressure calibration
Analog signal conditioning
0,5...4,5V ratiometric
ME75X
2 - 5 - 10 - 20 - 50 - 100 - 200- 400- Bar
Gauge
Piezoresistive ceramic pressure transducer cell
18.00 mm
Monolithic cavity membrane
Temperature and pressure calibration
ASIC - digital signal conditioning
0,5....4,5V (ratiom.) or 4-20mA or 0-10V
ME77X
0,5- 1- 2- 5- 10- 20- 50- 100- 200- 400- 600- Bar
Absolute- Gauge- Sealed Gauge Pressure
Piezoresistive ceramic pressure transducer cell
18.00 mm
Flush membrane
Temperature and pressure calibration
ASIC - digital signal conditioning
0,5....4,5V (ratiom.) or 4-20mA or 0-10V
ME780
0,5- 1- 2- 5- 10- 20- 50- 100- 200- 400- 600- Bar
Absolute- Gauge- Sealed Gauge Pressure
Piezoresistive ceramic pressure transducer cell
18.00 mm
Flush membrane
Temperature and pressure calibration
Embedded integrated electronic
0,5...4,5V ratiometric
ME55x
ME550
0.06- 0.16- 0.40- 1- 2- 5-10- 20- Bar
Absolute- Gauge Pressure
Capacitive ceramic pressure sensor
32.40 mm
Flush membrane -96% or 99% Al2O3
Cell without thermal compensation
Capacitance transduction principle
Capacity (pF) proportional to pressure
ME703
ME703
0.06- 0.16- 0.40- 1- 2- 5-10- 20- Bar
Absolute- Gauge Pressure
Capacitive ceramic pressure sensor
32.4 mm
Flush membrane Al2O3 96% or 99%
Si-Diode on the electronics
Conversion of capacity in frequency
Frequency signal Fx/Fr (Hz)
Customized sensors
MEMxxx
0.06....600 Bar f.s.
Absolute- GaugePressure
Piezoresistive, capacitive, silicon sensors (MEMS)
Custom design
Ceramic, steel, or silicon cells on ceramic or p.c.b. (COB)
Custom specific calibrations
Wheatshone bridge, embedded electronics, etc.
mV/V, V-ratiometric, current loop, Bus etc
CERAMIC PRESSURE SENSORS
BENEFITS AND APPLICATIONS
RESEARCH AND DEVELOPMENT
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© 2009-2010 Metallux SA - All Rights Reserved - sales@metallux.ch

 

 

 

 

 

 

 

 

 

 

 

Metallux SA (www.metallux.ch) - your innovation partner for:  pressure sensor cells - pressure transducers -  ceramic pressure sensors - thick film piezoresistive ceramic pressure sensors - flush membrane ceramic pressure sensor - cavity membrane ceramic pressure sensor -capacitance or capacitive ceramic pressure sensors - pressure and temperature ceramic measuring cells - pressure sensor for urea in SCR systems (selective Catalytic Reduction) - pressure range from 0,06Bar to 750 Bar- pressure sensors cell with signal conditioning output 4-20mA or 0,5-4,5V or 0/10V-pressure sensor for harsh applications - pressure transducers - pressure transmitters - absolute  pressure measurement -  gauge pressure measurement - sealed gauge pressure measurement - differential pressure measurement - high resistance to overpressure ceramic sensor cell -  chemical resistant sensor cell to aggressive media pressure cells - packaging technology for silicon pressure sensors - thick film hybrid electronic modues manufacturing - COB - chip & wire assemblies services.

 

© 2009-2010 Metallux SA - All Rights Reserved - sales@metallux.ch

 

 
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